List of microfabrication equipment suppliers

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This is a list of microfabrication machine suppliers.

Suppliers[edit]

Ancillary companies[edit]

These are companies that make supporting products

  • Entegris - makes wafer holding equipment

References[edit]

  1. ↑ 1.0 1.1 1.2 LaPedus, Mark (2004-04-20). "ASML debuts 193-nm dry/immersion litho tool". https://www.eetimes.com/asml-debuts-193-nm-dry-immersion-litho-tool/.
  2. ↑ https://www.advantest.com/en/news/2023/20231211.html
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