KLA

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KLA is a company that has made equipment for microfabrication process management. It was previously known as KLA Tencor.

Products[edit]

  • Axion T2000[1]
  • SpectraShape 10K[2]
  • SpectraShape 9000[2]
  • KLA 2367 - plasma patterned wafer defect inspector[3]
  • KLA 2835 - plasma patterned wafer defect inspector[3]
  • KLA 2965 - Plasma defect inspector[4]
  • KLA 2950 EP - Plasma defect inspector[4]
  • KLA 2900
  • KLA 2905
  • KLA 2910
  • KLA 2915
  • KLA 2920
  • KLA 2925
  • KLA 2930
  • KLA 2935
  • KLA 2950
  • KLA 2955
  • KLA 3900 - plasma wafer defect inspector[5]
  • KLA 3905 - plasma wafer defect inspector[5]
  • KLA 3920 - plasma wafer defect inspector[5]
  • KLA 3920 EP - plasma wafer defect inspector[5]
  • KLA 3935 - plasma wafer defect inspector[5]
  • KLA 8930[4]
  • KLA 8935

Teron[edit]

  • Teron 610[4]
  • Teron 630[4]
  • Teron 640
  • Teron 640e[4]
  • Teron SL650[4]
  • Teron SL655
  • Teron SL670e
  • Teron SL670e XP[4]

Surfscan[edit]

  • Surfscan SP A2[4]
  • Surfscan SP A3[4]
  • Surfscan SP1 TBI Pro
  • Surfscan SP1 DLS Pro
  • Surfscan SP2[4]
  • Surfscan SP2 XP
  • Surfscan SP3[4]
  • Surfscan SP5
  • Surfscan SP5 XP
  • Surfscan SP7[4]
  • Surfscan SP7 XP

Zeta[edit]

  • Zeta-20[4]
  • Zeta-300
  • Zeta-388[4]
  • Zeta-500[4]
  • Zeta-580
  • Zeta-600[4]
  • Zeta-680

Puma[edit]

  • Puma 9500[4]
  • Puma 9650
  • Puma 9850
  • Puma 9980[6]

Candela[edit]

  • Candela 6300[4]
  • Candela 7100[4]
  • Candela 8420
  • Candela 8520
  • Candela 8720[7]

Archer[edit]

  • Archer 200[4]
  • Archer 300
  • Archer 500[8]
  • Archer 500LCM
  • Archer 600
  • Archer 700
  • Archer 750[8]

Process Probe[edit]

  • Process Probe 1530[9]
  • Process Probe 1535[9]
  • Process Probe 1630[9]
  • Process Probe 1730
  • Process Probe 1840
  • Process Probe 1850[9]

References[edit]

  1. ↑ https://www.directindustry.com/prod/kla-corporation/product-113449-2578850.html
  2. ↑ 2.0 2.1 "Critical dimension measuring system SpectraShape series". 2024-06-02. https://www.directindustry.com/prod/kla-corporation/product-113449-1103061.html.
  3. ↑ 3.0 3.1 "Defect Inspection". https://www.kla.com/products/certified-remanufactured/cr-defect-inspection#product-2835-2367.
  4. ↑ 4.00 4.01 4.02 4.03 4.04 4.05 4.06 4.07 4.08 4.09 4.10 4.11 4.12 4.13 4.14 4.15 4.16 4.17 4.18 4.19 4.20 https://www.kla.com/products/products-a-z
  5. ↑ 5.0 5.1 5.2 5.3 5.4 "Defect Inspection & Review". https://www.kla.com/products/chip-manufacturing/defect-inspection-review?opentab=related-products#product-39xx.
  6. ↑ "Defect Inspection & Review". 2018-08-06. https://www.kla.com/products/chip-manufacturing/defect-inspection-review.
  7. ↑ https://www.kla.com/products/instruments/defect-inspectors/candela-8720
  8. ↑ 8.0 8.1 "Optical inspection machine". 2024-05-30. https://www.directindustry.com/prod/kla-corporation/product-113449-1409375.html.
  9. ↑ 9.0 9.1 9.2 9.3 "Wafer Manufacturing". https://www.kla.com/products/wafer-manufacturing.
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