Oxford Instruments
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Oxford Instruments is a company that makes microfabrication equipment. They sell products for high-brightness LED production.[1]
Products[edit]
- PlasmaPro NGP1000 line of machines - from 2010 - HBLED production on batch sizes from 61 two-inch wafers to 7 six-inch wafers.[2]
- PlasmaPro1000 Astrea from 2013 - HB-LED batch production[3]
References[edit]
- ↑ "HBLED Applications". https://plasma.oxinst.com/campaigns/markets/hbled-applications.
- ↑ "Plasma etch tools from Oxford Instruments for HB-LEDs". 2010-12-24. https://www.laserfocusworld.com/test-measurement/research/article/16568137/plasma-etch-tools-from-oxford-instruments-for-hb-leds.
- ↑ "Semiconductor Today". 2013-03-18. https://www.semiconductor-today.com/news_items/2013/MAR/OIPT_180313.html.