ASML
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ASML is a company that has made microfabrication equipment. It started as an offshoot of ASM.
Most of ASML's lithography products that they have produced are branded "TWINSCAN".
Their product lines are categorized into several families.
Products[edit]
NXE line (EUV lithography)[edit]
EXE line (High-NA EUV lithography)[edit]
NXT line[edit]
- NXT:870[8]
- NXT:1470[8]
- NXT:1950i[9][10]
- NXT:1980Di[11]
- NXT:1980Ei
- NXT:1980Fi[8]
- NXT:2000i
- NXT:2050i
- NXT:2100i[8]
XT line[edit]
- XT:400L
- XT:400M[8]
- XT:760
- XT:760F
- XT:860M[8]
- XT:860N[8]
- XT:1150i prototype[12]
- XT:1250[13]
- XT1250D
- XT:1250i[12]
- XT:1060K[8]
- XT:1400[12]
- XT:1400F
- XT:1450[14]
- XT:1460K[8]
- XT:1700i[15]
- XT 1700Fi
- XT:1900i[15]
AT line[edit]
HMI[edit]
YieldStar[edit]
PAS[edit]
Trivia[edit]
PAS stands for Philips Automatic Stepper.[23]
See also[edit]
References[edit]
- ↑ "ASML NXE:3100 Pre-Production EUV Scanner Performance at IMEC". https://euvlsymposium.lbl.gov/pdf/2013/pres/S1-2_EHendrickx.pdf.
- ↑ https://www.asml.com/en/products/euv-lithography-systems/twinscan-nxe3400b
- ↑ https://www.asml.com/en/products/euv-lithography-systems/twinscan-nxe3400c
- ↑ https://www.asml.com/en/en/products/euv-lithography-systems/twinscan-nxe-3600d
- ↑ https://www.asml.com/en/products/euv-lithography-systems/twinscan-nxe-3800e
- ↑ "With High NA EUV, Intel Foundry Opens New Frontier in Chipmaking". 2024-04-17. https://www.intel.com/content/www/us/en/newsroom/news/intel-foundry-opens-new-frontier-chipmaking.html.
- ↑ "Intel and ASML strengthen their collaboration to drive High-NA into manufacturing in the year +2025". 2022-01-19. https://www.asml.com/en/news/press-releases/2022/intel-and-asml-strengthen-their-collaboration-to-drive-high-na-into-manufacturing-in-2025.
- ↑ 8.0 8.1 8.2 8.3 8.4 8.5 8.6 8.7 8.8 "DUV lithography systems". https://www.asml.com/en/products/duv-lithography-systems.
- ↑ https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7640/76401N/Towards-ultimate-optical-lithography-with-NXT-1950i-dual-stage-immersion/10.1117/12.847025.short#_=_
- ↑ "Position Control in Lithographic Equipment [Applications of Control]". IEEE Control Systems 31 (5): 28–47. 2011. doi:10.1109/MCS.2011.941882. ISSN 1066-033X.
- ↑ https://www.asml.com/en/products/duv-lithography-systems/twinscan-nxt1980di
- ↑ 12.0 12.1 12.2 LaPedus, Mark (2004-04-20). "ASML debuts 193-nm dry/immersion litho tool". https://www.eetimes.com/asml-debuts-193-nm-dry-immersion-litho-tool/.
- ↑ https://www.asml.com/en/news/press-releases/2003/asml-introduces-industry-first-immersion-lithography-tool
- ↑ https://www.asml.com/en/news/press-releases/2006/asml-extends-arf-leadership
- ↑ 15.0 15.1 "ASML Ships TWINSCAN XT:1900i Lithography System for Volume Production". 2007-07-18. https://phys.org/news/2007-07-asml-ships-twinscan-xt1900i-lithography.html.
- ↑ https://www.asml.com/en/news/press-releases/2000/asml-launches-new-twinscan-300mm-lithography-platform
- ↑ https://www.asml.com/en/news/press-releases/2001/new-asml-twinscan-at850b-joins-family-of-high-resolution-lithography-systems
- ↑ https://www.eetimes.com/asml-pushes-248-nm-lithography-tools-to-0-11-micron-resolution/
- ↑ https://www.fabsurplus.com/sdi_catalog/salesItemDetails.do?id=110703
- ↑ 20.0 20.1 20.2 20.3 20.4 20.5 "Wafer Metrology & inspection systems". https://www.asml.com/en/products/metrology-and-inspection-systems.
- ↑ 21.0 21.1 21.2 21.3 https://www.chiphistory.org/173-asml-pas-2000-wafer-stepper
- ↑ https://www.chiphistory.org/exhibits/ex_se_asml_20yr_history/chapter2.pdf
- ↑ https://www.asml.com/en/en/news/stories/2021/three-decades-of-pas-5500