List of HBLED manufacturing equipment

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This is a list of machines for making high-brightness LEDs.

References[edit]

  1. ↑ "Lithography system from SUSS MicroTec for HB-LEDs". 2010-11-22. https://www.laserfocusworld.com/optics/article/16567818/lithography-system-from-suss-microtec-for-hb-leds.
  2. ↑ "KLA-Tencor launches HB-LED inspection tool for improved substrate and MOCVD process control". 2011-01-21. https://semiconductor-today.com/news_items/2011/JAN/KLA_210111.htm.
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