SUSS MicroTec MA100e Gen2

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The SUSS MicroTec MA100e Gen2 is a mask aligner for making high brightness LEDs. It supports wafers up to 4 inch in diameter.[1]

References[edit]

  1. ↑ "Lithography system from SUSS MicroTec for HB-LEDs". 2010-11-22. https://www.laserfocusworld.com/optics/article/16567818/lithography-system-from-suss-microtec-for-hb-leds.
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