Planar diffusion source

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A planar diffusion source is a type of dopant source that can be used in a diffusion process.

P-type PDS can be boron based.[1]

N type PDS can be phosphorus based.[1]

References[edit]

  1. ↑ 1.0 1.1 "Saint-Gobain PDS Products". https://cdn.thomasnet.com/ccp/10046374/36775.pdf.
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