PhosPlus TP-250

From XVRWiki
Jump to navigation Jump to search

PhosPlus TP-250 is a phosphorus dopant source.[1] It can be used in diffusion.[2]

It is a planar diffusion source.[2]

It contains phosphorus pentoxide, tantalum pentoxide, aluminium(III) oxide, and/or lanthanum(III) oxide.[2]

See also[edit]

References[edit]

  1. ↑ "PhosPlus Brochure". https://www.montana.edu/tjkaiser/ee407/notes/PhosPlusTP-250.pdf.
  2. ↑ 2.0 2.1 2.2 "2-3) Diffusion". https://sums.gatech.edu/articles/ProDiff.
Retrieved from "http://www.xvrwiki.org/index.php?title=PhosPlus_TP-250&oldid=8484"