ASML PAS 5500/60

From XVRWiki
(Redirected from PAS 5500/60)
Jump to navigation Jump to search

The ASML PAS 5500/60 is a wafer stepper from ASML.[1]

It operates in the i-line.

It uses 5X reduction imaging.[1]

There is or was a PAS 5500/60 at the Stanford Nanofabrication Facility.[1]

References[edit]

  1. ↑ 1.0 1.1 1.2 "ASML PAS 5500/60 i-line Stepper (asml)". https://snfguide.stanford.edu/guide/equipment/asml-pas-550060-i-line-stepper-asml.
Retrieved from "http://www.xvrwiki.org/index.php?title=ASML_PAS_5500/60&oldid=172126"