ASML PAS 5500/60

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The ASML PAS 5500/60 is a wafer stepper from ASML.[1]

It operates in the i-line.

It uses 5X reduction imaging.[1]

There is or was a PAS 5500/60 at the Stanford Nanofabrication Facility.[1]

References[edit]

  1. ↑ 1.0 1.1 1.2 "ASML PAS 5500/60 i-line Stepper (asml)". https://snfguide.stanford.edu/guide/equipment/asml-pas-550060-i-line-stepper-asml.
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