PAS 5500/100D
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The
PAS 5500/100D
is a stepper from
ASML
. It operates at 365 nm.
[1]
References
[
edit
]
↑
https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/files/products/refurbished-products/pas-5500-100d.pdf
Categories
:
Steppers
I-line steppers
Photolithography
Electronics manufacturing
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