SPR-3612

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SPR-3612 is a type of photoresist.[1] It was manufactured by Shipley, then Dow.[2]

It is also called Shipley 3612.

It is part of the SPR3600 series.

References[edit]

  1. ↑ "Determining etch rates with partially released structures". 2023-08-10. https://snfguide.stanford.edu/guide/docs/nano-nugget/determining-etch-rates-with-partially-released-structures.
  2. ↑ "Dow SPR3600 Positive Photoresist". https://web.archive.org/web/20141025024144if_/http://micromaterialstech.com/products/ig-line-photoresists/dow-spr3600-photoresists/.
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