Raith EBPG 5000+
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The Raith EBPG 5000+ is a direct write electron beam pattern generator from Raith.[1]
It can be used to pattern large areas by electron beam lithography.[2]
The Raith EBPG 5000+ is a direct write electron beam pattern generator from Raith.[1]
It can be used to pattern large areas by electron beam lithography.[2]