Optical lithography

Optical lithography (also termed photolithograpy or UV lithography) is the patterning of masks and samples with photoresist prior to other processing steps (e.g. deposition, etching, doping).

HMDS is applied first. Then photoresist. Then exposure happens. Then development.

Equipment

Exposure

• Stepper
• Contact aligner
• Direct write

HMDS

• TEL Mark Vz Coater (Tokyo Electron)