Lithography
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Lithography is the process of putting circuit designs into silicon.
A number of different methods can be used.
Lithography can be done at different sizes, for example, 250 nanometer (nm).
The 180 nm process was first to use copper metallization as a replacement for aluminum for interconnects.[1]
250nm[edit]
Commercial integrated circuit manufacturing using the 250nm process began.[2]
Intel's 250nm process used 200 mm wafers. The dielectric used was silicon dioxide. The electrode used was polysilicon. Intel's 250nm process' interconnects were aluminum, and its channels were silicon.[2]
IBM's 250nm lithography process was called CMOS-6X.