HMDS

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HMDS stands for hexamethyldisilazane. Its CAS number is 999-97-3.[1]

HMDS is often used as an adhesion promoter for photoresists.[1]

References[edit]

  1. ↑ 1.0 1.1 "Bis(trimethylsilyl)amine". 2006-08-22. https://en.wikipedia.org/wiki/Bis(trimethylsilyl)amine.
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