GCA 4800

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The GCA 4800 is the first true step and scan system for photolithography.

It could replace contact and proximity aligners.[1]

See also[edit]

References[edit]

  1. ↑ "GCA Mann 4800 Direct Step on Wafer". 1975-06-30. https://www.chiphistory.org/99-gca-mann-4800-direct-step-on-wafer-system.
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