AIX R6

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An AIX R6

The AIX R6 is a MOCVD system for HB-LED production. It was developed by AIXTRON.[1]

References[edit]

  1. ↑ "LayTec’s in-situ metrology used in Aixtron’s new AIX R6 HB-LED reactor". 2014-11-17. https://semiconductor-today.com/news_items/2014/NOV/LAYTEC_171114.shtml.
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