EV Group
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EV Group is a company that makes machines for microfabrication. It is also known as EVG.
Its name was originally Electronic Visions.[1]
Products[edit]
- Hercules NIL 200mm[2]
- Hercules NIL 300mm[2]
- IQ Aligner NT[3]
- EVG 40 NT measurement system[4]
- EVG 40 NT2 measurement system[5]
- EVG 50 measurement system[4]
- EVG 101
- EVG 501 - research bonder[6]
- EVG 510 - low volume bonder[6]
- EVG 520 IS - low volume bonder[6]
- EVG 540 - bonder[6]
- EVG 560 - high volume bonder[6]
- EVG 850 TB[7]
- EVG 850 LT[8]
- EVG 850 DB[7]
- EVG 850 NanoCleave[9]
- EVG 880 LayerRelease[7]
- Gemini FB bonder[10]
- Gemini FB XT bonder[10]
References[edit]
- ↑ https://memscyclopedia.org/su8.html
- ↑ 2.0 2.1 "HERCULES NIL". https://www.evgroup.com/products/nanoimprint-lithography/uv-nil-smartnil/hercules-nil.
- ↑ https://www.evgroup.com/products/lithography/mask-alignment-systems
- ↑ 4.0 4.1 "Error: no
|title=specified when using {{Cite web}}". https://www.evgroup.com/fileadmin/media/products/metrology/EVG_Solutions_for_Metrology_Brochure.pdf. - ↑ https://www.evgroup.com/products/metrology/evgr40-nt2
- ↑ 6.0 6.1 6.2 6.3 6.4 "Permanent Bonding Systems". https://www.evgroup.com/products/bonding/permanent-bonding-systems.
- ↑ 7.0 7.1 7.2 "Temporary Bonding and Debonding Systems". https://www.evgroup.com/products/bonding/temporary-bonding-and-debonding-systems/.
- ↑ https://www.evgroup.com/products/bonding/fusion-and-hybrid-bonding-systems/evg850-lt
- ↑ https://www.evgroup.com/company/news/detail/ev-group-brings-revolutionary-layer-transfer-technology-to-high-volume-manufacturing-with-evgr850-nanocleavetm-system
- ↑ 10.0 10.1 "Error: no
|title=specified when using {{Cite web}}". https://www.evgroup.com/fileadmin/media/products/bonding/EVG_Gemini_Brochure.pdf.