150mm wafer processing
(Redirected from 6-inch wafer fab)
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150mm wafer processing is the processing of 150mm wafers to create microelectronic machines. 150mm wafers are also known roughly as 6-inch wafers.
6-inch wafer fabs may occupy a sweet spot between the smaller 3 inch and 4 inch production process and the larger 200mm and 300mm process.
The company Coherent is related to 6-inch wafer processing.[1]
The smaller 4-inch processing is also known as 100mm wafer processing.
Equipment for 150mm wafer processing[edit]
- 150mm wafer shippers
- Entegris 182 series