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A '''LTPS deposition system''' is a machine that can deposit low temperature polysilicon onto a substrate. It uses deposition, either chemical vapor deposition or powder vapor deposition.
A '''LTPS deposition system''' is a machine that can deposit low temperature polysilicon onto a substrate. It uses deposition, either chemical vapor deposition or powder vapor deposition.
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+An example is the AKT-PK PECVD line of systems from Applied Materials.<ref name="y034">{{cite web | title=AKT-PX PECVD | website=Applied Materials | date=2024-05-03 | url=https://www.appliedmaterials.com/us/en/product-library/akt-px-pecvd.html | access-date=2024-07-10}}</ref>
==References==
==References==