Difference between revisions of "LTPS deposition system"
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(Created page with "A '''LTPS deposition system''' is a machine that can deposit low temperature polysilicon onto a substrate. ==References== <references />") |
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| − | A '''LTPS deposition system''' is a machine that can deposit low temperature polysilicon onto a substrate. | + | A '''LTPS deposition system''' is a machine that can deposit low temperature polysilicon onto a substrate. It uses deposition, either chemical vapor deposition or powder vapor deposition. |
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| + | An example is the AKT-PK PECVD line of systems from Applied Materials.<ref name="y034">{{cite web | title=AKT-PX PECVD | website=Applied Materials | date=2024-05-03 | url=https://www.appliedmaterials.com/us/en/product-library/akt-px-pecvd.html | access-date=2024-07-10}}</ref> | ||
==References== | ==References== | ||
<references /> | <references /> | ||
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| + | [[Category:Display manufacturing]] | ||