Creating ASML PAS 5500/60

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  • 01:47, 19 February 2025 Acro talk contribs deleted page ASML PAS 5500/60 (content was: "The '''ASML PAS 5500/60''' is a wafer stepper from ASML.<ref name="n526">{{cite web | title=ASML PAS 5500/60 i-line Stepper (asml) | website=Stanford Nanofabrication Facility | url=https://snfguide.stanford.edu/guide/equipment/asml-pas-550060-i-line-stepper-asml | access-date=2024-06-06}}</ref> It operates in the i-line. It uses 5X reduction imaging.<ref name="n526"/> There is o...", and the only contributor was "Acro" (talk))

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